TJ,

I always liked micro abrasive powder blasting for quick turn prototype work.

Jim


-----Original Message-----
From: 김태진 
To: mems-talk@memsnet.org
Sent: Fri, 1 May 2009 3:31 pm
Subject: [mems-talk] Bearing holes in pyrex/glass wafers


Hi all!
I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
afer.
I thought of etching the hole with DRIE, but thought it was inefficient and time
onsuming.
It also seems that I can't use conventional drilling machines to bear holes in
he pyrex as the substrate is to brittle.
Does anyone know how to drill holes in pyrex/glass wafers?
The features don't have to be too accurate..
Thanks!
TJ