Hi, See http://en.wikipedia.org/wiki/Dark_field_microscopy Sometimes, dark-field image is useful to inspect surface uniformity after etching. Oray Orkun Cellek On Sat, May 2, 2009 at 4:13 PM, Evelyn Bwrote: > Can anyone tell me what the purpose/application of dark field illumination > is? Can anyone recommend a good site or paper that explains the concept > and > shows applications?