durusmail: mems-talk: Tips to prevent Cu from oxidation
Tips to prevent Cu from oxidation
2009-05-04
Tips to prevent Cu from oxidation
Pavan Samudrala
2009-05-04
Hello all,

I was wondering if any of you has experience in preventing Cu from being
oxidized. I dont have an option of putting one of more layer. I am currently
doing something called BTA clean (benzotriazole) and it is quite time
consuming. Any comments/suggestions would be appreciated.

Thanks,
Pavan

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