Hi, Tarun mudgal Thank for your advise. Is the ultrasonic driller able to make an array of holes which have 400 micron diameter? If it is possible, would you please provide a little bit more details? Thanks a lot! Gong -------------------------------------------------- From: "tarun mudgal"Sent: Sunday, May 03, 2009 12:35 PM To: Subject: Re: [mems-talk] Bearing holes in pyrex/glass wafers > hi > > I have been drilling holes in glas wafers for microfluidic devices. > i am using an ultrasonic driller and along with the driller we just run > water > solution having SiC powder. it takes hardly 1-2 minutes for 0.5 mm glass > wafer > > maybe you could use that > > thnx > >