Compact and e-beam don't go together. You need a high voltage supply,
water cooling, high vac pumps. Also, for uniformity you need a long
throw distance, which means large chamber. If you are looking for
compact, then I wouldn't look at e-beam, or even thermal. You can get
very small DC sputter units, which people use for SEM sample prep.
They are desktop units.

On Tue, May 5, 2009 at 11:58 AM, Mehmet Aykol  wrote:
> Gong,
>
> E-beam evaporators tend to be big machines with big pumps. If you are
> just looking for a system to evaporate metal on substrates you might want to
> consider thermal evaporators.
>
> Mehmet