durusmail: mems-talk: Brittle SU-8
Brittle SU-8
2009-05-07
2009-05-07
2009-05-07
Brittle SU-8
Wong Wai Chi
2009-05-07
Hi, everybody,

I used SU-8 as devices material. I used PMMA as sacrificial material and
release by using acetone, i can get good material properties after release,
however, it become brittle after one week. did anybody face the same
problem? how to solve it?

thank
WaiChi
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