I'll guess that the Ni and Au set up a galvanic cell. Au is more electronegative (or more "noble") than Ni, so it will tend to remove electrons from the Ni when the two are in contact. This aids in forming positive nickel ions for the etch reaction. I've seen this type of situation with other pairs of metals, such as Cr touching Au and Al touching W. --Kirt Williams -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Ismail Erkin Gonenli Sent: Friday, May 15, 2009 11:32 AM To: mems-talk@memsnet.org Subject: [mems-talk] Gold etching with Ni on top Hello, Does anyone have a reference explaining why Ni is etched in KI:I2 based gold etchant when it is in contact with gold? Does it have anything to do with the miscibility gap between Ni and Au at low temperatures? Thanks, Erkin