durusmail: mems-talk: COC bonding
COC bonding
2009-05-20
COC bonding
Gareth Jenkins
2009-05-20
Hi

Does anyone have any experience of bonding Topas COC (8007x10)?
I haven't had any luck with pure thermal bonding in a heated press and
oxygen plasma treatment didn't help either. I also tried a solvent assisted
method (hexadecane + IPA) which stuck a little bit but not much.
N.B. I have to use 8007 so I can't use a lower Tg grade as an intermediate
layer and I have some quite shallow channels in my structure which makes it
harder.

If anyone has any good recipes, process tips or references that would be
great.

Gareth
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