Hi Andrea, I deal with a number of polishers around the world for flat wafers and none of them are capable of meeting a Site Flatness of 60 nm ( .06 um). The Best I have seen is 0.2um (200nm ) and that would only be on 85% of the sites with edge exclusion on a 100mm coplanar polished DSP wafer. Should you find anyone - Please let us know as well. Best Regards Ken Smith -----Original Message----- >From: Andrea Mazzolari>Sent: May 28, 2009 9:54 AM >To: General MEMS discussion >Subject: [mems-talk] Silicon wafers suppliers. > >Hi All, >i'm looking for a Silicon wafer supplier who can provide silicon wafers >with site flatenss of about 60nm over areas of 26x8mm >Is there any suggestion ? > >Thanks, >Andrea Kmbh Technologies kmbh-silicon@earthlink.net 47 Rocket Circle Rancho Cordova, CA USA 95742 Phone +1 510-714-5055 FAX+1 510-217 4421 Standard and Specialty CZ and FZ Silicon, Glass and other wafers.