Hi Nidhi, PDMS is an elastic material so thick layers will have some stress and will not result uniform but you will have what you see. That's the main reason for using e-beam evaporation. you should reduce the layer thickness you're depositing. > On Mon, Jun 1, 2009 at 12:08 AM, nidhi maheshwariwrote: > > Dear All, > > For some of my experiments I need to have metal patterns onto PDMS. I > have gone through the litreature available on net and found that > plasma oxidation followed by e-beam evaporation of metals form stable > metal films. As we dont have an e-beam system for evaporation of gold. > I tried depositing Chrome-Gold layers by sputter after plasma > oxidation of PDMS. What I obtained was buckled metal layers. Can > anyone please suggest some method to get rid of the buckling/ waves > formed. > > Regards, > Nidhi Maheshwari > IIT Bombay