Hi Nidhi, I've tried evaporating other materials onto PDMS, and I always observed the buckling films that you've described. Others have been able to deposit smooth films on PDMS with an e-beam evaporator because their set up included a temperature controller that allowed them to cool the PDMS when they were doing their deposition. If you want a thin film of gold on a PDMS slab, you might try one of the following: -Deposit the gold without an adhesion layer onto a silicon substrate. Then bring the PDMS slab into conformal contact with the film and lift it off the silicon. The gold should adhere preferentially to the PDMS. -Whitesides et al. have absorbed a photoinitiator into the PDMS and then exposed the material to UV light to further cross-link the PDMS and increase its elastic modulus. The paper is here: http://pubs.acs.org/doi/full/10.1021/la991302l -If you don't need PDMS specifically, there are other silicone materials commercially available that have high elastic moduli and won't buckle after you deposit a thin film on top. Look into Dow Corning's WL-5000 series of silicones. Hope this helps. Joshua Tice Graduate Research Assistant Kenis Research Group Dept. of Chemical & Biomolecular Engineering University of Illinois at Urbana-Champaign Roger Adams Laboratory, Room 216A, Box C3 600 South Mathews Avenue Urbana, IL 61801 217-333-2442 (office) 217-244-8068 (fax) On Wed, Jun 3, 2009 at 2:24 AM, nidhi maheshwariwrote: > Hi, > > Barbara, thanks for your reply. I tried reducing the thickness of PDMS > to around 200-300 microns by spin coating it onto a glass wafer. After > curing and plasma oxidation I tried sputter of Chrome and Gold. But it > still showed the same cracked layer. Can you or someone else please > suggest as to what I should be doing to avoid these cracked metal > films. > > warm regards, > Nidhi