Hi all,

Can someone suggest a method to etch a GGG substrate (Gadolinium Gallium Garnet)
with RIE?What kind of gas is necessary?

Thanks in advance.
Regards

Dr. Andrea Lucibello
Junior Researcher
CNR - Istituto per la Microelettronica e Microsistemi
Area della Ricerca di Roma 2 - Tor Vergata
Via del Fosso del Cavaliere, 100 - 00133 Roma
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