I would also think it is the temperature PDMS is exposed to. Try reducing the power and sputter films at low rate. I think it is worth a try. Regards, Pavan On Thu, Jun 4, 2009 at 10:34 AM, Barbara Cortesewrote: > Your gold is too thick, try to reduce it, say more than 50%. > > > The thickness of chrome was around 10nm and gold was around 100nm. > > > > Regards, > > Nidhi