Toluene will swell PDMS and disrupt the structure. I would suggest changing the solvent to a less aggressive one. > Hi.. > > Toluene solvent is good for thinning PDMS. I have used it for getting > PDMS films down to submicron level with extensive dilution of toluene. I > guess, it would be ok for dilution of polystyrene too. Probably, you > could do the surface prep before spinning on polystyrene. Like cleaning > surface with methanol and then plasma activation and then do immediately > coating of polystyrene.