Sounds like you have a leak in your system. If everything is working fine
you should have a light blueish plasma while ashing. Bob Henderson

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of saravan kallempudi
Sent: Tuesday, June 09, 2009 10:35 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] problem with DRIE

Hello all,

We are trying to ash polymer layer using DRIE with O2 plasma.
We observe purple pink color plasma and the process was never successful.
Plasma parameters are 100W, 0.2 mbar.

Please suggest me!!

Thanks,
Saravan