never tried this. but you may wanna try to use a thin layer of uncrosslinked
SU-8 as adhension layer. that might help
Guocheng Shao
--- On Tue, 6/23/09, ê¹íì§ wrote:
From: ê¹íì§
Subject: [mems-talk] bonding su-8 layer with pdms?
To: mems-talk@memsnet.org
Date: Tuesday, June 23, 2009, 12:58 AM
Hi all!
Has anyone tried bonding a Su-8 layered substrate with PDMS?
I made a attempts by treating a su-8 film coated wafer with pdms using oxygen
plasma (30W for 1 min), but the devices seemed not bond at all.
Does anyone have suggestions?
Thanks!
Best regards,
TJ