durusmail: mems-talk: Polyimide stripper
Polyimide stripper
1998-10-15
Polyimide stripper
Jong In Song
1998-10-15
I have been looking for a polyimide stripper that can resolve a cured
polyimide (commercial products from Ciba Geigy  285 and Dupont PI 25XX cured
~250 C for ~ 1hr).  I used  such product manufactured by Ciba-Geigy (product
number: QZ????) a long time ago (~ 6 year ago) while I was in the States.  I
was told that Ciba-Geigy discontinued the product and another company became
a new  manufacturer of it.  Does anybody know which company produce such
products ?   The QZ???? did not attack  materials used for semiconductor
device processing such as semiconductors (Si, GaAs, InP, etc), dielectrics
(Silicon dioxide, nitride), and metals (Ti, Ni, Pt, Au, etc) at all.

I would really like to appreciate your help on this matter.

Best wishes,
Jong-In Song

Associate Professor
Dept. of Information and Communications
Kwangju Institute of Science and Technology (K-JIST)
572 Sangam-dong Kwangsan-ku
Kwangju, Korea 506-712
tel) +82-62-970-2208
fax) +82-62-970-2204


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