Pradeep, use Nickel as the adhesion layer. Electroplate and sinter in. Woods nickel strike, sulfamate nickel plate. Gary -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of mikas remeika Sent: Monday, June 29, 2009 3:41 PM To: General MEMS discussion Subject: Re: [mems-talk] Oxidation of Molybdenum Here's a website that has a lot of info on etching recipes: http://www.ee.byu.edu/cleanroom/wet_etch.phtml On Mon, Jun 29, 2009 at 1:26 AM, Pradeep Dixitwrote: > Hello Everyone, > > I would like to check something with you: > > 1. Has any one tried to electroplate copper on a Molybdenum seed layer ? > > 2. I think, Molybdenum oxidizes easily. Does anyone have an idea on how > to remove Molybdenum oxide ? wet etching or dry plasma etching?