Hi It depends how thick is your PDMS layer. if it is thick enough perhaps more than 50 micron you can simply peel it off by hand but you should have silanized your silicon wafer before application of PDMS. if your layer is not thick enough it is possible to pour more PDMS on it and cure it and then remove the two layers that are now bonded together. Good luck! Seyed Quoting "Shah, Forum N": > Hi, > > I am spinning PDMS on Si wafer on which the sensors would be fabricated. > > Can anyone suggest a way to peel off the PDMS layer from the Si > wafer once the fabrication process is over? > > When I tried using acetone it rather just removes the PDMS in an > irregular fashion and does not let me peel off the PDMS layer > completely keeping it intact. > > Thanks, > > Forum