hi,

try to pour more PDMS on it and bake in the oven, after bake, you can
peel it off.



2009/7/10 Shah, Forum N 

> Hi,
>
> I am spinning PDMS on Si wafer on which the sensors would be fabricated.
>
> Can anyone suggest a way to peel off the PDMS layer from the Si wafer  once
> the fabrication process is over?
>
> When I tried using acetone it rather just removes the PDMS in an irregular
> fashion and does not let me peel off the PDMS layer completely keeping it
> intact.
>
> Thanks,
>
> Forum

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赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University