Hi, Zard,

I am not sure about the maximum thickness one can achieve from LPCVD.
But I can easily get 7um with our furnace. As for the stress, it is
not serious for my cantilevers. Acturally, I think the stress problem
for a thick layer would not be as bad as with a thin layer.

Best regards,
Fei

2009/7/16, MyMEMS Talk :
> Hi y'all...
>
> I am thinking about converting some of my SOI MEMS process into those with
> polysilicon and wonder how thick of a polysilicon can one grow.  What I am
> looking for is something that at least 7um or more (15um).  Is that possible
> to do?
> Or the stress would be too much for such film?
>
> Thanks in advance
> Zard

--
Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
Fax:  +45 4588 7762
Email: fei.wang@nanotech.dtu.dk
       http://www.nanotech.dtu.dk