Hi Zard,

a thickness in the range of 10 - 20 um after CMP is standard for
polysilicon MEMS at STM,Bosch, FreeScale, SensorDynamics, etc.
Thicker epipoly is possible without problems, it's simply a matter of cost.

kr,
Martin Heller

Zard wrote:

Hi y'all...

I am thinking about converting some of my SOI MEMS process into those with
polysilicon and wonder how thick of a polysilicon can one grow.  What I am
looking for is something that at least 7um or more (15um).  Is that possible to
do?
Or the stress would be too much for such film?

Thanks in advance
Zard