Hi, all,

     One of my colleagues are trying to do some nitrogen plasma surface
treatment. We have a PC2000 plasma cleaning system from South Bay Tech.
available in our lab. But it is normally used for sampling cleaning with oxygen
or argon plasma. We have been reading literatures about process parameters they
used in their nitrogen plasma treatment procedure, it looks like a 50mTorr
vacuum, 13.56MHz 150Watts forward power RF power supplier and a nitrogen line
should be able to do the job. We read the system manual and talked to the
technicians in South Bay Tech. Our system can reach these process parameter
values and the technician guy said he think the reflection power may be higher
than usual oxygen or argon plasma. According to my understanding, small amount
of reflection power should be fine, the RF power supplier should be able to
dissipate this power. But I'm not 100% sure.

   So if there's any one here have worked with nitrogen plasma, would you pls
share some process details with me? and is there any precautions that we should
be taken when working with nitrogen plasma, comparing to oxygen plasma and argon
plasma.

   Thanks in advance.

Guocheng Shao