Dear Mr.Cheng-Hsien Liu
I am involved in the acceleration standard.
How  are you going to calibrate electron tunneling accelerometer.
Wihtout calibration, it is only a guess, never measurement for ever !!.
I am looking forward to hearing from you.
Yours
Akira Umeda
NRLM











At 4:50 AM -0700 98.9.29, Cheng-Hsien Liu wrote:
> Hi, MEMS colleague,
>
> I am working on a project- high precision micromachined
> accelerometer using electron tunneling transducer. I try to
> make a comparison table about different micromachined
> accelerometers.  If you work (or ever)on micromachined
> accelerometers using any transducers (capacitive, piezoelectric,
> piezoresist,..) (or know where I could find these information),
> could you please email me the following information (or point out
> where I could have the information):
>
> 1. Researcher or company (references)
> 2. Noise floor (?mg/root(Hz) or ?micro-g/root(Hz)) (How about
> low frequency?)
> 3. Bandwidth (?Hz) (both sensor measurement bandwidth and resonant
> frequency of proof mass)
> 4. Sensitivity (V/g)
> 5. Dynamic Range (?dB and ?g max)
> 6. Working principle (capacitive, tunneling, piezo....)
> 7. Fabrication (Bulk-micromachined, surface-micro...)
> 8. Proofmass (? milli-gram or ? micro-gram)
> 9. Device area (area including proofmass and cantilever beams or
> membrane:?mmx?mm)
> 10. Operating Voltage (high voltage supply :V)
> 11. Open-Loop or closed-loop with feedback control circuit needed?
> 12. One axis, two axes, or three axes for each sensor unit?
>
> The more details the better.  Your help is highly appreciated.
> Best regards,
>
>