Hi,

a really good methode is described here using microsystems technologies. I
don't know if it's available in english.

http://www.freidok.uni-freiburg.de/volltexte/1249/index.html

Adam


> -----Ursprüngliche Nachricht-----
> Von: mems-talk-bounces@memsnet.org
> [mailto:mems-talk-bounces@memsnet.org] Im Auftrag von Robert Fahey
> Gesendet: Dienstag, 28. Juli 2009 05:50
> An: mems-talk@memsnet.org
> Betreff: [mems-talk] microfabrication of blade strcures
>
> Hi All
>
> i'm looking into possible methods of using microfabrication
> methods to fabricate blade or cutting structures. I was
> wondering if anyone on here has any suggestions or knows of
> any similar work that has been carried out in the past?
>
> I was thinking of using KOH etching of <100> Si wafers and
> use the natural 54.7degree angle as a cutting edge. Can I
> treat the Si in any way to make the cutting edge harder? Does
> anyone have any experience on the use of silicon
> carbide/tungsten carbide/similar materials for hardening purposes?
>
> Does anyone have any other suggestions? I would also be keen
> to explore options in metals.
>
> thanks
> Rob