I know there have been papers published on micro end mills and micro
ball mills, with cutting surfaces appropriate to those purposes.  The
company MicroEndMill even offers for sale a carbide end mill which is 50
um in diameter and 150 um long.  If you use scholar.google.com and look
up 'micro end mill', you'll get papers on the first and second pages
addressing both wearout phenomena as well as toughness as well as
fabrication processes.

Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
ahenning@nanoink.net

-----Original Message-----
From: Robert Fahey [mailto:Robert.Fahey@invetech.com.au]
Sent: Monday, July 27, 2009 8:50 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] microfabrication of blade strcures

Hi All

i'm looking into possible methods of using microfabrication methods to
fabricate blade or cutting structures. I was wondering if anyone on here
has any suggestions or knows of any similar work that has been carried
out in the past?

I was thinking of using KOH etching of <100> Si wafers and use the
natural 54.7degree angle as a cutting edge. Can I treat the Si in any
way to make the cutting edge harder? Does anyone have any experience on
the use of silicon carbide/tungsten carbide/similar materials for
hardening purposes?

Does anyone have any other suggestions? I would also be keen to explore
options in metals.

thanks
Rob