durusmail: mems-talk: Silicon Nitride wafers
Silicon Nitride wafers
2009-08-03
Silicon Nitride wafers
Pavan Samudrala
2009-08-03
Hello all,

I was wondering if anyone knows a vendor who can supply Silicon Nitride
wafers. I am looking for 150um thick silicon wafers coated with 100nm of
SiNx on both sides.

Any advice or suggestions are very welcome.

Thanks,

Pavan Samudrala
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