Rob,

I also have experience with making blades from 100 silicon using different
etches to form various blade shapes. I would enjoy the discussion.

Dan Chilcott
ITT

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Robert MacDonald
Sent: Tuesday, July 28, 2009 2:21 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] microfabrication of blade structures

Rob,

I've had some success fabricating blades out of 100 Si using a KOH etch. This
may be a good place to start.

Rob MacDonald
Shearwater Scientific