SEMI publishes a standard reference technique for measurement of surface
roughness on silicon wafers.  I don't recall the number of the specification
offhand.  Contact http://www.semi.org.

Al

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
ahenning@nanoink.net

-----Original Message-----
From: antwi nimo [mailto:nimoantwi1980@yahoo.com]
Sent: Friday, July 31, 2009 7:58 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Surface roughness measurement of Si

There are tons of Si surfaces u can measure...was it a polished silicon
surface...anodized or what...and there are a number of ways u can use the find
the average surface roughness..
AFM is one such example....

With your profilometer, this should not be a problem at all...it is just
specification problem....and for you to know very well what machine you are
using.