Questions, Are you vacuum vapor priming, soft baking, and hard baking?
If so what temperatures are you using?  What photo resist and how long
is the etch?

Bill Moffat

________________________________

From: mems-talk-bounces@memsnet.org on behalf of abhaya joshi
Sent: Sat 8/8/2009 7:25 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] about platinum etching

hi,

i am doing platinum etching (200nm). i am using HCL (8):HNO3 (1)
solution at 70C>

i am observing lot of non uniform etching behavior and lot of
undercutting.

can any one suggest how to avoid this.

-abhay joshi
university of pune