Hi Abhay,

Pt etching in aqua regia at >85C should work well.
Alternatively you can etch thin Pt films (<500nm) with IBE (ion beam etching)
quite easily and cleanly (uniform, no undercutting). About 30° of tilt would
enhence the etching rate.

Regards

Natsuki


abhay  joshi writes:

hi,

i am doing platinum etching (200nm). i am using HCL (8):HNO3 (1) solution at
70C>

i am observing lot of non uniform etching behavior and lot of undercutting.
can any one suggest how to avoid this.

-abhay joshi
university of pune