Hi, Bill,

    thx for the reply. sorry, I do actually mean HMDS. I want to silanize the
mold so it will be easier to release PDMS film from the SU8 mold.   I know
people usually use TMCS. But heard some people say HMDS can work as well.   How
long do I need to do the treatment if put couple drops of HMDS along with my SU8
mold into a evacuated dessicator?.  thx


Shao

--- On Wed, 8/12/09, Bill Moffat  wrote:


From: Bill Moffat 
Subject: [mems-talk] HDMS treatment of SU8 mold used for PDMS thin film
fabrication
To: "General MEMS discussion" 
Date: Wednesday, August 12, 2009, 4:25 AM


Need more information.  Do you mean HMDS instead of HDMS?  Do you want
to stick to the SU8 mold? Do you want a release agent from the SU8 mold?
HMDS is not toxic, it liberates a small amount of ammonia when it reacts
with the Hydrogen in moisture.  Bill Moffat