Hi Renil,

In case you're already using HDMS prior to spinning your photoresist, I would
then suspect the cleanliness of your surfaces. A piranha clean (more involved
and dangerous in my opinion) or Summa-Clean (very easy) should help solve your
subsequent adhesion problems (AZ5214E) during photolithography/liftoff - A
piranha dip once solved an adhesion problem for me that was only noticed for my
silicon chips (originally clean) that were stored in plastic chip cases for some
months.


Best regards,

Thomas E. Wilson
Professor of Physics
Marshall University
Science 154
One John Marshall Drive
Huntington, WV  25755-2570
Tel: 304.696.2752
FAX: 304.696.2494