Hi Yoshi,

I'm not sure what you mean by breakdown voltage- do you mean the
electrostatic pull-in voltage, or do you mean the maximum voltage before
electrostatic discharge? Both are relevant to MEMS, and both have simple
equations that are fairly easy to find in the literature.

Jason Milne
PhD Candidate
Microelectronics Research Group
School of Electrical, Electronic and Computer Engineering
The University of Western Australia

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Yoshi.Sakata_Gmail
Sent: Friday, 14 August 2009 7:43 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Breakdown Voltage

Hi All,

I'm going to estimate the breakdown voltage of both the parallel plate type
actuator and comb drive actuator. Anybody have the idea to estimate? Thanks,

Yoshi