Hi Bill, How do you deposit the heptadecafluoride? I am looking for a surface that remains hydrophobic after patterning. For example: deposit SiO2, functionalise SiO2 to remain hydrophobic, pattern and etch SiO2 + hydrophobic layer and remove mask. The surface must remain hydrophobic after processing. Thanks, Andrew 2009/8/13 Bill Moffat> There are better chemical than HMDS and TCMS. For release agents you > are looking for the highest achievable water contact angle. Teflon has > 13 fluorine molecules facing out and a contact angle of 120 degrees. > With a heptadecafluoride there are 17 fluorine molecules facing out and > a contact angle of 130 degrees. Good news but the real secret is to > totally dehydrate before the chemical sees the mold. If it sees > moisture it reacts with the moisture but breaks free later when it sees > moist room air. This gives erratic surface tension modification. How > big are your molds? Bill