Andrew,

       Missed the first question. Heptadeca has a different vapor
pressure than HMDS.  We have a special system that vaporizes the Hepta
deca before introducing it into the process chamber.  A 1224P.  Bill

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Andrew
Sent: Monday, August 17, 2009 5:01 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] HDMS treatment of SU8 mold used for PDMS thin
filmfabrication

Hi Bill,

How do you deposit the heptadecafluoride? I am looking for a surface
that remains hydrophobic after patterning. For example: deposit SiO2,
functionalise SiO2 to remain hydrophobic, pattern and etch SiO2 +
hydrophobic layer and  remove mask. The surface must remain hydrophobic
after processing.

Thanks,

Andrew