Hi Huihang

Could you share with us how you did image reversal with S1827 please?

Thanks,
Leo

On Fri, Aug 21, 2009 at 9:18 AM, Huihang Dong wrote:
> Hi,
>
> I patterned Ti-Pt on cured polyimide layer by lift-off (don't know what is
your substrate).
> The PR 1827(around 2.7 um) was patterned by Image reversal which can give you
negative angle on the edge of trench to make lift-off easier. The Lift-off took
me about 10-20 min.
>
> Hope this can help.
>
> Thanks,
> Huihang

--
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu