huge. Even more than 100 if you choose some recipes aiming at fast etching.

On Mon, Aug 24, 2009 at 7:20 AM, renil kumar wrote:
> Hi all,
>             Can I use PMMA as hard mask during Silicon DRIE. What is the
selectivity between PMMA and Silicon during Bosch process. Any suggestions
regarding this will be grately appreciated.
>
> renil

*  Zou Jie (Jay)
*  Department of Physics
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