If your beam only consists of silicon nitride, I think low stress nitride should
be adopted. LPCVD silicon rich Si3N4 is a commerical choice for low stress
silicon nitride.

If your beam consists of two or more materials, I think the stress gradient of
the beam should be carefully studied to get a straight beam after release.

xudehui0108


 Roger Shile wrote on 2009-08-18  00:32:18:

Can someone suggest a commercial for low stress silicon nitride with low
stress gradient?
Low stress gradient is important as the films will be used to fabricate
free standing beams which must remain straight when released.
Roger Shile