durusmail: mems-talk: Cleaning surfaces particle free
Cleaning surfaces particle free
2009-08-25
2009-08-25
2009-08-26
Cleaning surfaces particle free
Pavan Samudrala
2009-08-25
Hello all,

I am stripping AZ resists in AZ400T stripper (immersion based stripping).
After stripping, I see small particles of resist lying on the wafer. Does
anyone have a good method of stripping the wafers or cleaning the stripped
wafers to make it particle free.

The environment I work is not a clean room and will not be particle free.
But I am trying to reduce the particles on the wafers as much as humanly
possible.

Regards,

Pavan Samudrala

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