You should be able to, provided the linewidths are ~2 microns, at least using a recipe that I submitted last week. I've lifted off 5000 A Nb (and 200 nm Al/Pd) using it with sharp lines. I'll resend if I can find it. ________________________________________ From: mems-talk-bounces@memsnet.org [mems-talk-bounces@memsnet.org] On Behalf Of Chih-Chieh Cheng [chih-chieh.cheng@asu.edu] Sent: Tuesday, August 25, 2009 3:51 PM To: mems-talk@memsnet.org Subject: [mems-talk] Lift-off 8000 A gold using PR 5214 Hello everyone, As title, has anyone ever tried lift-off 8000 A gold (or any other metal) using PR 5214? The thickness of gold is relatively thick so I am wondering it may not work perfectly. Thanks for your time. CC