durusmail: mems-talk: gold as electrical contact
gold as electrical contact
2009-08-30
2009-08-30
gold as electrical contact
renil kumar
2009-08-30
Hi All,

                 Can gold be an electrical contact for n-type SOI wafer. I am
planning to sputter gold on the SOI wafer as an electrical contact and bulk etch
the silicon to form the electrostatically movable cantilever. Any suggestion
would be appreciated.

Thanks in advance.

Renil



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