Hello all,
I am not sure what we call this kind of wafer cleaning apparatus. But let me
try.

I am looking for a circular structure with grooves in it and a opening at
the center to go onto a axis. The grooves should be able to hold 1-1.5"
square wafers. The opening at the center is to put it on an axle and spin at
higher speeds. I am not sure what this kind of a product is called. I need
to use this in a spin dryer from FSI corporation and I cannot find any
products related to that tool.

I know the email sounds very vague but the whole point is to clean multiple
small wafers in a spin dry equipment. Any advice would be really
appreciated.

Thanks,

--
Pavan Samudrala