Hello everyone,

I would like to know the effect of KOH etchant solution (30% by wt, temp
room to 85C) on PDMS (Sylgard 184 Dow Corning Corp). Specifically, does the
reaction produce any toxic products/gases? Also what is the efffect on the
integrity of PDMS? Did anyone observe any etching/delamnation issues? The
PDMS is coated on silicon nitride in my case.

Thank you,
Bhargav