durusmail: mems-talk: SU8
SU8
2009-09-08
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SU8
Gareth Jenkins
2009-09-15
I too am having trouble understanding this! My guess is some cross-linking
occurs without the bake - at least enough to allow development of the
pattern without it totally lifting off.
Using a release agent such as Omnicoat would also be an option for this
process.

On Fri, Sep 11, 2009 at 10:23, Maria Matschuk <
Maria.Matschuk@nanotech.dtu.dk> wrote:

> I'm wondering, if you delete the cross-linking step, how does it
> withstand the development solution?
>
> Bets regards
> Maria
>
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