durusmail: mems-talk: Pt Ion Milling
Pt Ion Milling
Pt Ion Milling
Ruiz, Marcos Daniel (SENCOE)
2009-09-15
This has also been my experience.

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Morrison, Richard
H., Jr.
Sent: Tuesday, September 15, 2009 11:49 AM
To: deepasree.k@gmail.com; General MEMS discussion
Subject: Re: [mems-talk] Pt Ion Milling

Hi,

Ion Mill does not have any selectivity, it etches at the sputter rate of
the material, everything etches, organics are slower than metals but
most metals are real close to each other for sputter rate.

Rick
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