durusmail: mems-talk: Receipe for diluted aqua regia
Receipe for diluted aqua regia
2009-09-15
2009-09-16
2009-09-16
2009-09-16
Receipe for diluted aqua regia
Christian Engel
2009-09-15
Hi guys,

I want to etch a layer of gold, which has been deposited on a glass surface,
with a thickness of about 30nm by using aqua regia. Non-diluted the each
rate is too strong so I have to relax it a litte bit. Does anyone have a
recommendable receipe for diluted aqua regia? Etch time should be about 15
seconds for the whole 30nm gold layer...

Thanks a lot and best regards, Chris

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