Why aqua regia? Why not a KI or NaI solution? You can dilute these
chemistries with ethylglycol or something to slow them further.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Christian Engel
Sent: Tuesday, September 15, 2009 3:41 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Receipe for diluted aqua regia


Hi guys,

I want to etch a layer of gold, which has been deposited on a glass
surface, with a thickness of about 30nm by using aqua regia. Non-diluted
the each rate is too strong so I have to relax it a litte bit. Does
anyone have a recommendable receipe for diluted aqua regia? Etch time
should be about 15 seconds for the whole 30nm gold layer...