This actually brings up an interesting point,

Most of the people I know have learned everything they know about
semiconductor processing from colleagues and by reading spec-sheets.
Occasionally, however, it is interesting to read about more general
aspects of the micro/nanofabrication that don't necessarily relate to
one's own work.

So, I'm interested, what books would the readers of this forum
recommend as a general introduction to the field. Something that would
not be completely basic, i.e. contain usable technical information,
but not to the point of being a reference book, and preferably not a
textbook for undergraduates.

Looking forwards to your suggestions,
-mikas

On Thu, Sep 10, 2009 at 5:37 PM, Te LI  wrote:
> Hi MOS,
>
> I suggest you to read some fudenmental book about semiconductor processes..
> Some basic concepts will be found there.
>
> Regards,
> COOLT