Have you considered potassium iodide + iodine? I'm not sure about exact etch
rates but believe it to be much less aggressive than aqua regia.


On Tue, Sep 15, 2009 at 21:40, Christian Engel wrote:

> Hi guys,
>
> I want to etch a layer of gold, which has been deposited on a glass
> surface,
> with a thickness of about 30nm by using aqua regia. Non-diluted the each
> rate is too strong so I have to relax it a litte bit. Does anyone have a
> recommendable receipe for diluted aqua regia? Etch time should be about 15
> seconds for the whole 30nm gold layer...
>
> Thanks a lot and best regards, Chris